Compound Materials and Other Products

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SiC Coated Graphite (PERMA KOTE ™)

SEM Photograph of PERMA KOTE™ surface

With the rapid progress in higher density semiconductor products, high purity graphite has grown in demand so as to reduce gas desorption of carbon surfaces as well as the amount of dust and impurities. Made by depositing a SiC layer on isotropic graphite using CVD process, PERMA KOT™ is very active in and around the semiconductor manufacturing industry.

Pancake Susceptor

Barrel Susceptor

Pyrolytic graphite coating (PYROGRAPH ™)

PYROGRAPH ™ is a high purity graphite product on which we deposit pyrolytic carbon using an original CVD process of our own. It has the effect of reducing gas permeation and preventing reactions, for which it is often used for analytical equipment parts, high temperature reactor parts and all kinds of tools.

Graphite sheets (PERMA-FOIL™)

PERMA-FOIL™ is a flexible graphite sheet made from specially processed natural graphite without use of a binder. Special processing developed by us gives it a flexibility and compression recovery not found with conventional graphite products. These qualities ensure a snug fit with contacting parts, therefore it is widely used as a seal, to note automotive gaskets and packing.

Characteristics of PERMA-FOIL™

Features

High chemical resistance and chemical stability
Applicable as insulator and others due to thermal and electric anisotropy
Highly self-lubricating materials
Only 1% stress relaxation to eliminate retightening
Ideal materials for sealing due to flexibility and resilience to fit other materials
Material most suitable for heat dissipation or heat transfer having excellent thermal conductivity.

Application・Products

Automotive gaskets
Packing materials for chemical plants
For furnaces insulators
High-purity furnace parts
Spacers for making semiconductors
Heat dissipation graphite sheet

Graphite Sheet for Automotive Gasket

Heat Dissipation Graphite Sheet

C/C Composite

C/C composite is a carbon-carbon composite material reinforced by high strength carbon fiber for the purpose of improving strength and shock resistance of carbon materials. It is a hi-tech carbon material that is equally selected for general industrial use as it is used in advanced technological fields such as aerospace and semiconductor manufacture. To meet the diversified needs of the 21st century, the Toyo Tanso Group offers a filament winding type in our FW Series, a two-dimensional type in our CX Series and special grade composites.

Characteristics of C/C Composite
Features Light weight and high mechanical strength High heat resistance High shock resistance Low coefficients thermal expansion	Application・Products Materials for single crystal silicon growth devices Dies for hot presses

2D (2 Dimensional Woven Type)

Composite FW Type (Filament Winding)

GLASTIX KOTE™

GLASTIX KOTE™ is a graphite substrate impregnated or coated with glass-like carbon. It has the effect of preventing dust and improving surface hardness, which has made it widely used in semiconductor and metallurgic fields.