SiC Coated Graphite (PERMA KOTE ™)
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With the rapid progress in higher density semiconductor products, high purity graphite has grown in demand so as to reduce gas desorption of carbon surfaces as well as the amount of dust and impurities. Made by depositing a SiC layer on isotropic graphite using CVD process, PERMA KOT™ is very active in and around the semiconductor manufacturing industry. |